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Microelectronics

Ceramic laser machining

Milling

Partial milling of ceramic cavities to countersink bare dice

Advantages

  • shorter wire bond connections
  • optimal heat dissipation


Cutting

Cuttings with any geometries

  • to countersink bare dice, in combination with a chip carrier or heatsink
  • to realize capacious through holes for power applications

Advantages

  • shorter wire bond connection
  • optimal heat dissipation


Drilling and Scribing

Drilling of ceramics for high quality holes as well as precise scribe lines with small tolerances
(min. +50 / -25 microns)

Advantages

  • narrow profile of the hole edges, slight taper
  • excellent metallization of the drilled holes
  • improved quality of the scribed edges in comparison to CO2-Laser


Sawing

Sawing of ceramics or other substrates with a wafer saw

Advantages

  • sawing of very thin or thick as well as small sized substrates
  • outer edges of high quality with close tolerances (±15 microns)